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Small plasma source for materials application.
Vizir, A; Oks, E M; Salvadori, M C; Teixeira, F S; Brown, I G.
Affiliation
  • Vizir A; High Current Electronics Institute, Russian Academy of Sciences, Tomsk 634055, Russia.
Rev Sci Instrum ; 78(8): 086103, 2007 Aug.
Article in En | MEDLINE | ID: mdl-17764363
Subject(s)
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Collection: 01-internacional Database: MEDLINE Main subject: Materials Testing / Microfluidics / Gases / Heating Type of study: Diagnostic_studies Language: En Journal: Rev Sci Instrum Year: 2007 Document type: Article Affiliation country: RUSSIA Country of publication: United States
Search on Google
Add to My VHL
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PubMed Links

Collection: 01-internacional Database: MEDLINE Main subject: Materials Testing / Microfluidics / Gases / Heating Type of study: Diagnostic_studies Language: En Journal: Rev Sci Instrum Year: 2007 Document type: Article Affiliation country: RUSSIA Country of publication: United States