Characterization of a-SiC(x):H thin films as an encapsulation material for integrated silicon based neural interface devices.

Hsu, Jui-Mei; Tathireddy, Prashant; Rieth, Loren; Normann, A Richard; Solzbacher, Florian

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Characterization of a-SiC(x):H thin films as an encapsulation material for integrated silicon based neural interface devices.

Hsu, Jui-Mei; Tathireddy, Prashant; Rieth, Loren; Normann, A Richard; Solzbacher, Florian.

Affiliation

Hsu JM; Department of Material Science and Engineering, University of Utah, Salt Lake City, UT, USA.

Thin Solid Films ; 516(1): 34-41, 2007 Nov 01.

Article in En | MEDLINE | ID: mdl-18437249

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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Thin Solid Films Year: 2007 Document type: Article Affiliation country: United States Country of publication: Netherlands