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Nanoscale holographic interferometry for strain measurements in electronic devices.
Hÿtch, Martin; Houdellier, Florent; Hüe, Florian; Snoeck, Etienne.
Affiliation
  • Hÿtch M; CEMES-CNRS, nMat Group, 29 rue Jeanne Marvig, 31055 Toulouse, France. hytch@cemes.fr
Nature ; 453(7198): 1086-9, 2008 Jun 19.
Article in En | MEDLINE | ID: mdl-18563161
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Nature Year: 2008 Document type: Article Affiliation country: France Country of publication: United kingdom
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Nature Year: 2008 Document type: Article Affiliation country: France Country of publication: United kingdom