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Hybrid nanoimprint-soft lithography with sub-15 nm resolution.
Li, Zhiwei; Gu, Yanni; Wang, Lei; Ge, Haixiong; Wu, Wei; Xia, Qiangfei; Yuan, Changsheng; Chen, Yanfeng; Cui, Bo; Williams, R Stanley.
Affiliation
  • Li Z; Department of Materials Science and Engineering, National Laboratory of Solid State Microstructure, Nanjing University, Nanjing 210093, People's Republic of China.
Nano Lett ; 9(6): 2306-10, 2009 Jun.
Article in En | MEDLINE | ID: mdl-19422192
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Nano Lett Year: 2009 Document type: Article Country of publication: United States
Fulltext
Add to My VHL
Print
XML
PubMed Links
Search on Google

Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Nano Lett Year: 2009 Document type: Article Country of publication: United States