The role of helium ion microscopy in the characterisation of complex three-dimensional nanostructures.
Ultramicroscopy
; 110(9): 1178-84, 2010 Aug.
Article
in En
| MEDLINE
| ID: mdl-20452124
ABSTRACT
This work addresses two major issues relating to Helium Ion Microscopy (HeIM). First we show that HeIM is capable of solving the interpretation difficulties that arise when complex three-dimensional structures are imaged using traditional high lateral resolution techniques which are transmission based, such as scanning transmission electron microscopy (STEM). Secondly we use a nano-composite coating consisting of amorphous carbon embedded in chromium rich matrix to estimate the mean escape depth for amorphous carbon for secondary electrons generated by helium ion impact as a measure of HeIM depth resolution.
Full text:
1
Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
Ultramicroscopy
Year:
2010
Document type:
Article
Affiliation country:
United kingdom