CMOS-integrated film bulk acoustic resonators for label-free biosensing.

Nirschl, Martin; Rantala, Arto; Tukkiniemi, Kari; Auer, Sanna; Hellgren, Ann-Charlotte; Pitzer, Dana; Schreiter, Matthias; Vikholm-Lundin, Inger

Nirschl, Martin; Rantala, Arto; Tukkiniemi, Kari; Auer, Sanna; Hellgren, Ann-Charlotte; Pitzer, Dana; Schreiter, Matthias; Vikholm-Lundin, Inger.

Affiliation

Nirschl M; Siemens AG Munich, Corporate Technology, Otto-Hahn-Ring 6, 81739 Munich, Germany. martin.nirschl.ext@siemens.com

Sensors (Basel) ; 10(5): 4180-93, 2010.

Article in En | MEDLINE | ID: mdl-22399875

Subject(s)

Acoustics/instrumentation; Biosensing Techniques/instrumentation; Metals/chemistry; Oxides/chemistry; Semiconductors; Staining and Labeling; Animals; Buffers; Calcitonin/genetics; Cattle; Cyclooxygenase 2/genetics; DNA/analysis; Limit of Detection; Microscopy, Electron, Scanning; Polymerase Chain Reaction; Protein Precursors/genetics; Quartz Crystal Microbalance Techniques; Serum; Serum Albumin, Bovine/analysis; Surface Plasmon Resonance

Key words

CMOS; DNA; FBAR; TSM; biomolecular interaction analysis; biosensor; film bulk acoustic resonator; label-free; thickness shear mode

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Full text: 1 Collection: 01-internacional Database: MEDLINE Main subject: Oxides / Semiconductors / Staining and Labeling / Acoustics / Biosensing Techniques / Metals Limits: Animals Language: En Journal: Sensors (Basel) Year: 2010 Document type: Article Affiliation country: Germany Country of publication: Switzerland

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