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Structural and optical characterization of pure Si-rich nitride thin films.
Debieu, Olivier; Nalini, Ramesh Pratibha; Cardin, Julien; Portier, Xavier; Perrière, Jacques; Gourbilleau, Fabrice.
Affiliation
  • Debieu O; CIMAP, UMR 6252 CNRS-ENSICAEN-CEA-UCBN, Ensicaen, 6 Bd Maréchal Juin, 14050 Caen, cedex 4, France. o_debieu@yahoo.fr.
Nanoscale Res Lett ; 8(1): 31, 2013 Jan 16.
Article in En | MEDLINE | ID: mdl-23324447
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Nanoscale Res Lett Year: 2013 Document type: Article Affiliation country: France Country of publication: United States
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Nanoscale Res Lett Year: 2013 Document type: Article Affiliation country: France Country of publication: United States