Low-cost, phase-shifting mechanisms for Newton-type interferometers.

ABSTRACT

Using standard optical shop equipment, it is possible to implement simple, low-cost, phase-shifting Newton interferometers sufficiently accurate for surface evaluation. The simplification of the phase-shifting mechanism is compensated with image-processing algorithms that can deal with vibrations and uneven, nonsequential steps. The results are cross-compared with a Fizeau phase-shifting interferometer to verify the effectiveness of the method.