Improving optical properties of silicon nitride films to be applied in the middle infrared optics by a combined high-power impulse/unbalanced magnetron sputtering deposition technique.
Appl Opt
; 53(4): A377-82, 2014 Feb 01.
Article
in En
| MEDLINE
| ID: mdl-24514241
Full text:
1
Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
Appl Opt
Year:
2014
Document type:
Article
Country of publication:
United States