Development of microwave ion source for industrial applications.
Rev Sci Instrum
; 85(2): 02C306, 2014 Feb.
Article
in En
| MEDLINE
| ID: mdl-24593643
ABSTRACT
A microwave ion source is one of the long-life ion sources. In this paper, we report on the characteristics of the extracted Ar ion beam produced by a microwave ion source under various conditions, in terms of magnetic flux distribution and mass flow, and the stability of the ion beam. The measured spectra show that, under the experimental condition, almost all of produced ions were Ar(+) ions. For more than 6 h, the ion beam was stable.
Full text:
1
Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
Rev Sci Instrum
Year:
2014
Document type:
Article
Affiliation country:
Japan