Chemical Stability of Titania and Alumina Thin Films Formed by Atomic Layer Deposition.
ACS Appl Mater Interfaces
; 7(27): 14816-21, 2015 Jul 15.
Article
in En
| MEDLINE
| ID: mdl-26107803
Full text:
1
Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
ACS Appl Mater Interfaces
Journal subject:
BIOTECNOLOGIA
/
ENGENHARIA BIOMEDICA
Year:
2015
Document type:
Article
Country of publication:
United States