Investigations of AlN thin film crystalline properties in a wide temperature range by in situ X-ray diffraction measurements: Correlation with AlN/sapphire-based SAW structure performance.

Aït Aïssa, Keltouma; Elmazria, Omar; Boulet, Pascal; Aubert, Thierry; Legrani, Ouadra; Mangin, Denis

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Investigations of AlN thin film crystalline properties in a wide temperature range by in situ X-ray diffraction measurements: Correlation with AlN/sapphire-based SAW structure performance.

Aït Aïssa, Keltouma; Elmazria, Omar; Boulet, Pascal; Aubert, Thierry; Legrani, Ouadra; Mangin, Denis.

IEEE Trans Ultrason Ferroelectr Freq Control ; 62(7): 1397-402, 2015 Jul.

Article in En | MEDLINE | ID: mdl-26168184

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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: IEEE Trans Ultrason Ferroelectr Freq Control Journal subject: MEDICINA NUCLEAR Year: 2015 Document type: Article