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Theory and New Applications of Ex Situ Lift Out.
Giannuzzi, Lucille A; Yu, Zhiyang; Yin, Denise; Harmer, Martin P; Xu, Qiang; Smith, Noel S; Chan, Lisa; Hiller, Jon; Hess, Dustin; Clark, Trevor.
Affiliation
  • Giannuzzi LA; 1EXpressLO LLC,5483 Lee St.,Unit 12,Lehigh Acres,FL 33971,USA.
  • Yu Z; 2Department of Materials Science and Engineering,Lehigh University,Bethlehem,PA 18015,USA.
  • Yin D; 2Department of Materials Science and Engineering,Lehigh University,Bethlehem,PA 18015,USA.
  • Harmer MP; 2Department of Materials Science and Engineering,Lehigh University,Bethlehem,PA 18015,USA.
  • Xu Q; 3DENSsolutions,Delftechpark 26,2628 XH Delft,The Netherlands.
  • Smith NS; 4Oregon Physics, LLC,19075 NW Tanasbourne Dr.,Suite 150,Hillsboro,OR 97124,USA.
  • Chan L; 5Tescan USA, Inc.,765 Commonwealth Dr.,Suite 101,Warrendale,PA 15086,USA.
  • Hiller J; 5Tescan USA, Inc.,765 Commonwealth Dr.,Suite 101,Warrendale,PA 15086,USA.
  • Hess D; 6Materials Research Institute, The Pennsylvania State University,Millennium Science Complex,University Park,PA 16802,USA.
  • Clark T; 6Materials Research Institute, The Pennsylvania State University,Millennium Science Complex,University Park,PA 16802,USA.
Microsc Microanal ; 21(4): 1034-48, 2015 Aug.
Article in En | MEDLINE | ID: mdl-26223551
ABSTRACT
The ex situ lift out (EXLO) adhesion forces are reviewed and new applications of EXLO for focused ion beam (FIB)-prepared specimens are described. EXLO is used to manipulate electron transparent specimens on microelectromechanical systems carrier devices designed for in situ electron microscope analysis. A new patented grid design without a support film is described for EXLO. This new slotted grid design provides a surface for holding the specimen in place and also allows for post lift out processing. Specimens may be easily manipulated into a backside orientation to reduce FIB curtaining artifacts with this slotted grid. Large EXLO specimens can be manipulated from Xe+ plasma FIB prepared specimens. Finally, applications of EXLO and manipulation of FIB specimens using a vacuum probe lift out method are shown. The vacuum probe provides more control for placing specimens on the new slotted grids and also allows for easy manipulation into a backside configuration.
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Microsc Microanal Year: 2015 Document type: Article Affiliation country: United States
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Microsc Microanal Year: 2015 Document type: Article Affiliation country: United States