Compact permanent magnet H⺠ECR ion source with pulse gas valve.
Rev Sci Instrum
; 87(2): 02A718, 2016 Feb.
Article
in En
| MEDLINE
| ID: mdl-26931936
ABSTRACT
Compact H(+) ECR ion source using permanent magnets is under development. Switching the hydrogen gas flow in pulse operations can reduce the gas loads to vacuum evacuation systems. A specially designed piezo gas valve chops the gas flow quickly. A 6 GHz ECR ion source equipped with the piezo gas valve is tested. The gas flow was measured by a fast ion gauge and a few ms response time is obtained.
Full text:
1
Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
Rev Sci Instrum
Year:
2016
Document type:
Article
Affiliation country:
Japan
Country of publication:
EEUU
/
ESTADOS UNIDOS
/
ESTADOS UNIDOS DA AMERICA
/
EUA
/
UNITED STATES
/
UNITED STATES OF AMERICA
/
US
/
USA