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Compact permanent magnet H⁺ ECR ion source with pulse gas valve.
Iwashita, Y; Tongu, H; Fuwa, Y; Ichikawa, M.
Affiliation
  • Iwashita Y; Institute for Chemical Research, Kyoto University, Uji, Kyoto 611-0011, Japan.
  • Tongu H; Institute for Chemical Research, Kyoto University, Uji, Kyoto 611-0011, Japan.
  • Fuwa Y; Institute for Chemical Research, Kyoto University, Uji, Kyoto 611-0011, Japan.
  • Ichikawa M; Japan Atomic Research Agency, Naka, Ibaraki 311-0193, Japan.
Rev Sci Instrum ; 87(2): 02A718, 2016 Feb.
Article in En | MEDLINE | ID: mdl-26931936
ABSTRACT
Compact H(+) ECR ion source using permanent magnets is under development. Switching the hydrogen gas flow in pulse operations can reduce the gas loads to vacuum evacuation systems. A specially designed piezo gas valve chops the gas flow quickly. A 6 GHz ECR ion source equipped with the piezo gas valve is tested. The gas flow was measured by a fast ion gauge and a few ms response time is obtained.
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Rev Sci Instrum Year: 2016 Document type: Article Affiliation country: Japan Country of publication: EEUU / ESTADOS UNIDOS / ESTADOS UNIDOS DA AMERICA / EUA / UNITED STATES / UNITED STATES OF AMERICA / US / USA
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Rev Sci Instrum Year: 2016 Document type: Article Affiliation country: Japan Country of publication: EEUU / ESTADOS UNIDOS / ESTADOS UNIDOS DA AMERICA / EUA / UNITED STATES / UNITED STATES OF AMERICA / US / USA