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Design, Fabrication and Characterization of a MEMS-Based Three-Dimensional Electric Field Sensor with Low Cross-Axis Coupling Interference.
Ling, Biyun; Peng, Chunrong; Ren, Ren; Chu, Zhaozhi; Zhang, Zhouwei; Lei, Hucheng; Xia, Shanhong.
Affiliation
  • Ling B; State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China. lingbiyun15@mails.ucas.ac.cn.
  • Peng C; University of Chinese Academy of Sciences, Beijing 100049, China. lingbiyun15@mails.ucas.ac.cn.
  • Ren R; State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China. crpeng@mail.ie.ac.cn.
  • Chu Z; State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China. renren@mail.ie.ac.cn.
  • Zhang Z; State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China. czz_casie@163.com.
  • Lei H; University of Chinese Academy of Sciences, Beijing 100049, China. czz_casie@163.com.
  • Xia S; State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China. zhangzhouwei15@mails.ucas.ac.cn.
Sensors (Basel) ; 18(3)2018 Mar 15.
Article in En | MEDLINE | ID: mdl-29543744
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Sensors (Basel) Year: 2018 Document type: Article Affiliation country: China
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Sensors (Basel) Year: 2018 Document type: Article Affiliation country: China