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Pt thermal atomic layer deposition for silicon x-ray micropore optics.
Takeuchi, Kazuma; Ezoe, Yuichiro; Ishikawa, Kumi; Numazawa, Masaki; Terada, Masaru; Ishi, Daiki; Fujitani, Maiko; Sowa, Mark J; Ohashi, Takaya; Mitsuda, Kazuhisa.
Appl Opt ; 57(12): 3237-3243, 2018 Apr 20.
Article in En | MEDLINE | ID: mdl-29714311
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Appl Opt Year: 2018 Document type: Article Country of publication: United States
Fulltext
Add to My VHL
Print
XML
PubMed Links
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Appl Opt Year: 2018 Document type: Article Country of publication: United States