A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors.

Mathew, Ribu; Ravi Sankar, A

Mathew, Ribu; Ravi Sankar, A.

Affiliation

Mathew R; School of Electronics Engineering (SENSE), Vellore Institute of Technology (VIT) Chennai, Chennai, Tamil Nadu, 600127, India.
Ravi Sankar A; School of Electronics Engineering (SENSE), Vellore Institute of Technology (VIT) Chennai, Chennai, Tamil Nadu, 600127, India. a.ravishan@gmail.com.

Nanomicro Lett ; 10(2): 35, 2018.

Article in En | MEDLINE | ID: mdl-30393684

Key words

Biological sensor; Cantilever; Chemical sensor; Immobilization; Piezoresistor; SU-8 polymer; Surface stress

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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Nanomicro Lett Year: 2018 Document type: Article Affiliation country: India

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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Nanomicro Lett Year: 2018 Document type: Article Affiliation country: India