Mid-infrared cavity resonator integrated grating filters.

ABSTRACT

Cavity Resonator Grating Filters (CRIGFs) working in the Mid-Infrared are reported, with narrow-band resonant reflectivity peaks around 2200 cm-1 (4.6 µm). They are fabricated in the GaAs/AlGaAs material system that can potentially cover the whole [1-12] µm spectral range. TE-polarized peak reflectivity is 30% with a 4 cm-1 full width at half maximum.