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Atomic Layer Deposition for Membranes, Metamaterials, and Mechanisms.
Dorsey, Kyle J; Pearson, Tanner G; Esposito, Edward; Russell, Sierra; Bircan, Baris; Han, Yimo; Miskin, Marc Z; Muller, David A; Cohen, Itai; McEuen, Paul L.
Affiliation
  • Dorsey KJ; School of Applied and Engineering Physics, Cornell University, 271 Clark Hall, Ithaca, NY, 14853, USA.
  • Pearson TG; School of Applied and Engineering Physics, Cornell University, 271 Clark Hall, Ithaca, NY, 14853, USA.
  • Esposito E; Laboratory of Atomic and Solid State Physics, Cornell University, 511 Clark Hall, Ithaca, NY, 14853, USA.
  • Russell S; College of Nanoscale Sciences, SUNY Polytechnic Institute, 247 Fuller Road, Albany, NY, 12203, USA.
  • Bircan B; School of Applied and Engineering Physics, Cornell University, 271 Clark Hall, Ithaca, NY, 14853, USA.
  • Han Y; School of Applied and Engineering Physics, Cornell University, 271 Clark Hall, Ithaca, NY, 14853, USA.
  • Miskin MZ; Laboratory of Atomic and Solid State Physics, Cornell University, 511 Clark Hall, Ithaca, NY, 14853, USA.
  • Muller DA; Kavli Institute for Nanoscale Science, Cornell University, 420 Physical Sciences Building, Ithaca, NY, 14853, USA.
  • Cohen I; School of Applied and Engineering Physics, Cornell University, 271 Clark Hall, Ithaca, NY, 14853, USA.
  • McEuen PL; Kavli Institute for Nanoscale Science, Cornell University, 420 Physical Sciences Building, Ithaca, NY, 14853, USA.
Adv Mater ; 31(29): e1901944, 2019 Jul.
Article in En | MEDLINE | ID: mdl-31148291
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Adv Mater Journal subject: BIOFISICA / QUIMICA Year: 2019 Document type: Article Affiliation country: United States Country of publication: Germany
Fulltext
Add to My VHL
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Adv Mater Journal subject: BIOFISICA / QUIMICA Year: 2019 Document type: Article Affiliation country: United States Country of publication: Germany