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Volume Fabrication of Quantum Cascade Lasers on 200 mm-CMOS pilot line.
Coutard, J G; Brun, M; Fournier, M; Lartigue, O; Fedeli, F; Maisons, G; Fedeli, J M; Nicoletti, S; Carras, M; Duraffourg, L.
Affiliation
  • Coutard JG; Univ. Grenoble Alpes, CEA, LETI, F38054, Grenoble, France.
  • Brun M; mirSense - Centre d'intégration NanoINNOV, Bâtiment 863, 8 avenue de la Vauve, F91120, Palaiseau, France.
  • Fournier M; Univ. Grenoble Alpes, CEA, LETI, F38054, Grenoble, France.
  • Lartigue O; Univ. Grenoble Alpes, CEA, LETI, F38054, Grenoble, France.
  • Fedeli F; Univ. Grenoble Alpes, CEA, LETI, F38054, Grenoble, France.
  • Maisons G; mirSense - Centre d'intégration NanoINNOV, Bâtiment 863, 8 avenue de la Vauve, F91120, Palaiseau, France.
  • Fedeli JM; Univ. Grenoble Alpes, CEA, LETI, F38054, Grenoble, France.
  • Nicoletti S; Univ. Grenoble Alpes, CEA, LETI, F38054, Grenoble, France.
  • Carras M; mirSense - Centre d'intégration NanoINNOV, Bâtiment 863, 8 avenue de la Vauve, F91120, Palaiseau, France.
  • Duraffourg L; Univ. Grenoble Alpes, CEA, LETI, F38054, Grenoble, France. laurent.duraffourg@cea.fr.
Sci Rep ; 10(1): 6185, 2020 Apr 10.
Article in En | MEDLINE | ID: mdl-32277096
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Sci Rep Year: 2020 Document type: Article Affiliation country: France
Fulltext
Add to My VHL
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XML
PubMed Links
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Sci Rep Year: 2020 Document type: Article Affiliation country: France