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Characterization of 4H- and 6H-Like Stacking Faults in Cross Section of 3C-SiC Epitaxial Layer by Room-Temperature µ-Photoluminescence and µ-Raman Analysis.
Scuderi, Viviana; Calabretta, Cristiano; Anzalone, Ruggero; Mauceri, Marco; La Via, Francesco.
Affiliation
  • Scuderi V; CNR-IMM, VIII Strada, 5, 95121 Catania, Italy.
  • Calabretta C; CNR-IMM, VIII Strada, 5, 95121 Catania, Italy.
  • Anzalone R; STMicroelectronics, Stradale Primosole, 50, 95121 Catania, Italy.
  • Mauceri M; LPE, XVI Strada, 95121 Catania, Italy.
  • La Via F; CNR-IMM, VIII Strada, 5, 95121 Catania, Italy.
Materials (Basel) ; 13(8)2020 Apr 13.
Article in En | MEDLINE | ID: mdl-32295087
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Full text: 1 Collection: 01-internacional Database: MEDLINE Type of study: Prognostic_studies Language: En Journal: Materials (Basel) Year: 2020 Document type: Article Affiliation country: Italy
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Full text: 1 Collection: 01-internacional Database: MEDLINE Type of study: Prognostic_studies Language: En Journal: Materials (Basel) Year: 2020 Document type: Article Affiliation country: Italy