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Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry.
Kilic, Ufuk; Mock, Alyssa; Sekora, Derek; Gilbert, Simeon; Valloppilly, Shah; Melendez, Giselle; Ianno, Natale; Langell, Marjorie; Schubert, Eva; Schubert, Mathias.
Affiliation
  • Kilic U; Department of Electrical and Computer Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska, 68588, USA. ufuk.kilic@huskers.unl.edu.
  • Mock A; Department of Electrical and Computer Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska, 68588, USA.
  • Sekora D; Department of Electrical and Computer Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska, 68588, USA.
  • Gilbert S; Department of Physics and Astronomy, University of Nebraska-Lincoln, Lincoln, Nebraska, USA.
  • Valloppilly S; Nebraska Center for Materials and Nanoscience, University of Nebraska-Lincoln, Lincoln, Nebraska, 68588, USA.
  • Melendez G; Department of Chemical Engineering, Polytechnic University of Puerto Rico, San Juan, Puerto Rico.
  • Ianno N; Department of Electrical and Computer Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska, 68588, USA.
  • Langell M; Department of Chemistry, University of Nebraska - Lincoln, Lincoln, Nebraska, 68588, USA.
  • Schubert E; Department of Electrical and Computer Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska, 68588, USA.
  • Schubert M; Department of Electrical and Computer Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska, 68588, USA. schubert@engr.unl.edu.
Sci Rep ; 10(1): 10392, 2020 Jun 25.
Article in En | MEDLINE | ID: mdl-32587273
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Sci Rep Year: 2020 Document type: Article Affiliation country: United States
Fulltext
Add to My VHL
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XML
PubMed Links
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Sci Rep Year: 2020 Document type: Article Affiliation country: United States