Molecular layer deposition of hybrid siloxane thin films by ring opening of cyclic trisiloxane (V3D3) and azasilane.
Chem Commun (Camb)
; 56(62): 8778-8781, 2020 Aug 04.
Article
in En
| MEDLINE
| ID: mdl-32618293
Full text:
1
Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
Chem Commun (Camb)
Journal subject:
QUIMICA
Year:
2020
Document type:
Article
Country of publication:
United kingdom