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Anti-contamination SMART (Spectrum Monitoring Apparatus with Roll-to-roll Transparent film) window for optical diagnostics of plasma systems.
Kim, Jongyoon; Lee, Kang-Il; Jeong, Hyun-Young; Lee, Ji-Hoon; Choi, Yong Sup.
Affiliation
  • Kim J; Future Semiconductor Convergence Technology Research Center, Division of Electronics Engineering, Chonbuk National University, Jeonju 54896, Korea.
  • Lee KI; Institute of Plasma Technology, Korea Institute of Fusion Energy (KFE), Gunsan 54004, Korea.
  • Jeong HY; R&D Team, YEST, Pyeongtaek 17716, Korea.
  • Lee JH; Future Semiconductor Convergence Technology Research Center, Division of Electronics Engineering, Chonbuk National University, Jeonju 54896, Korea.
  • Choi YS; Institute of Plasma Technology, Korea Institute of Fusion Energy (KFE), Gunsan 54004, Korea.
Rev Sci Instrum ; 92(1): 013507, 2021 Jan 01.
Article in En | MEDLINE | ID: mdl-33514259
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Full text: 1 Collection: 01-internacional Database: MEDLINE Type of study: Diagnostic_studies / Qualitative_research Language: En Journal: Rev Sci Instrum Year: 2021 Document type: Article Country of publication: United States
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Full text: 1 Collection: 01-internacional Database: MEDLINE Type of study: Diagnostic_studies / Qualitative_research Language: En Journal: Rev Sci Instrum Year: 2021 Document type: Article Country of publication: United States