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Fabrication of All-GaN Integrated MIS-HEMTs with High Threshold Voltage Stability Using Supercritical Technology.
Liu, Meihua; Yang, Yang; Chang, Changkuan; Li, Lei; Jin, Yufeng.
Affiliation
  • Liu M; School of Electronic and Computer Engineering, Peking University Shenzhen Graduate School, University Town, Xili, Nanshan, Shenzhen 518055, China.
  • Yang Y; School of Electronic and Computer Engineering, Peking University Shenzhen Graduate School, University Town, Xili, Nanshan, Shenzhen 518055, China.
  • Chang C; School of Electronic and Computer Engineering, Peking University Shenzhen Graduate School, University Town, Xili, Nanshan, Shenzhen 518055, China.
  • Li L; School of Electronic and Computer Engineering, Peking University Shenzhen Graduate School, University Town, Xili, Nanshan, Shenzhen 518055, China.
  • Jin Y; School of Electronic and Computer Engineering, Peking University Shenzhen Graduate School, University Town, Xili, Nanshan, Shenzhen 518055, China.
Micromachines (Basel) ; 12(5)2021 May 18.
Article in En | MEDLINE | ID: mdl-34069925
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Micromachines (Basel) Year: 2021 Document type: Article Affiliation country: China Country of publication: Switzerland
Fulltext
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Micromachines (Basel) Year: 2021 Document type: Article Affiliation country: China Country of publication: Switzerland