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Parameter retrieval of small particles in dark-field Fourier ptychography and a rectangle in real-space ptychography.
Wei, Xukang; Urbach, H Paul; van der Walle, Peter; Coene, Wim M J.
Affiliation
  • Wei X; Optics Research Group, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands. Electronic address: x.wei-2@tudelft.nl.
  • Urbach HP; Optics Research Group, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands.
  • van der Walle P; TNO Optics Department, Stieltjesweg 1, Delft, 2628 CK, The Netherlands.
  • Coene WMJ; Optics Research Group, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands; ASML Netherlands B.V, De Run 6501, Veldhoven, 5504 DR, The Netherlands.
Ultramicroscopy ; 229: 113335, 2021 Oct.
Article in En | MEDLINE | ID: mdl-34243020
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Ultramicroscopy Year: 2021 Document type: Article
Fulltext
Add to My VHL
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XML
PubMed Links
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Ultramicroscopy Year: 2021 Document type: Article