Your browser doesn't support javascript.
loading
Deposition, Characterization, and Modeling of Scandium-Doped Aluminum Nitride Thin Film for Piezoelectric Devices.
Zhang, Qiaozhen; Chen, Mingzhu; Liu, Huiling; Zhao, Xiangyong; Qin, Xiaomei; Wang, Feifei; Tang, Yanxue; Yeoh, Keat Hoe; Chew, Khian-Hooi; Sun, Xiaojuan.
Affiliation
  • Zhang Q; Shanghai Normal University, Shanghai 200234, China.
  • Chen M; Shanghai Normal University, Shanghai 200234, China.
  • Liu H; Shanghai Normal University, Shanghai 200234, China.
  • Zhao X; Shanghai Normal University, Shanghai 200234, China.
  • Qin X; Shanghai Normal University, Shanghai 200234, China.
  • Wang F; Shanghai Normal University, Shanghai 200234, China.
  • Tang Y; Shanghai Normal University, Shanghai 200234, China.
  • Yeoh KH; Department of Electrical and Electronic Engineering, Lee Kong Chian Faculty of Engineering and Science, Universiti Tunku Abdul Rahman, Kajang 43000, Malaysia.
  • Chew KH; Department of Physics, University of Malaya, Kuala Lumpur 50603, Malaysia.
  • Sun X; State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.
Materials (Basel) ; 14(21)2021 Oct 27.
Article in En | MEDLINE | ID: mdl-34771961
Key words
Fulltext
Add to My VHL
Print
XML
PubMed Links
Search on Google

Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Materials (Basel) Year: 2021 Document type: Article Affiliation country: China Country of publication: Switzerland
Fulltext
Add to My VHL
Print
XML
PubMed Links
Search on Google

Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Materials (Basel) Year: 2021 Document type: Article Affiliation country: China Country of publication: Switzerland