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PCA-based sub-surface structure and defect analysis for germanium-on-nothing using nanoscale surface topography.
Jeong, Jaewoo; Kim, Taeyeong; Lee, Bong Jae; Lee, Jungchul.
Affiliation
  • Jeong J; Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology, Daejeon, 34141, South Korea.
  • Kim T; Center for Extreme Thermal Physics and Manufacturing, Korea Advanced Institute of Science and Technology, Daejeon, 34141, South Korea.
  • Lee BJ; Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology, Daejeon, 34141, South Korea.
  • Lee J; Center for Extreme Thermal Physics and Manufacturing, Korea Advanced Institute of Science and Technology, Daejeon, 34141, South Korea.
Sci Rep ; 12(1): 7205, 2022 May 03.
Article in En | MEDLINE | ID: mdl-35504973
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Sci Rep Year: 2022 Document type: Article Affiliation country: South Korea Country of publication: United kingdom
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Sci Rep Year: 2022 Document type: Article Affiliation country: South Korea Country of publication: United kingdom