Design of multi-axis micromotion system in TERS and its nonlinearity and crosstalk correction method.
ISA Trans
; 136: 640-650, 2023 May.
Article
in En
| MEDLINE
| ID: mdl-36379758
Full text:
1
Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
ISA Trans
Year:
2023
Document type:
Article
Affiliation country:
China
Country of publication:
United States