Room-temperature bonding of Al2O3 thin films deposited using atomic layer deposition.
Sci Rep
; 13(1): 3581, 2023 Mar 03.
Article
in En
| MEDLINE
| ID: mdl-36869072
Full text:
1
Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
Sci Rep
Year:
2023
Document type:
Article
Affiliation country:
Japan