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Room-temperature bonding of Al2O3 thin films deposited using atomic layer deposition.
Takakura, Ryo; Murakami, Seigo; Watanabe, Kaname; Takigawa, Ryo.
Affiliation
  • Takakura R; Graduate School of Information Science and Electrical Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka, 819-0395, Japan.
  • Murakami S; Graduate School of Information Science and Electrical Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka, 819-0395, Japan.
  • Watanabe K; Graduate School of Information Science and Electrical Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka, 819-0395, Japan.
  • Takigawa R; Graduate School of Information Science and Electrical Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka, 819-0395, Japan. takigawa@ed.kyushu-u.ac.jp.
Sci Rep ; 13(1): 3581, 2023 Mar 03.
Article in En | MEDLINE | ID: mdl-36869072
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Sci Rep Year: 2023 Document type: Article Affiliation country: Japan
Fulltext
Add to My VHL
Print
XML
PubMed Links
Search on Google

Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Sci Rep Year: 2023 Document type: Article Affiliation country: Japan