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Wet-Oxidation-Assisted Chemical Mechanical Polishing and High-Temperature Thermal Annealing for Low-Loss 4H-SiC Integrated Photonic Devices.
Shi, Xiaodong; Lu, Yaoqin; Chaussende, Didier; Rottwitt, Karsten; Ou, Haiyan.
Affiliation
  • Shi X; Department of Electrical and Photonics Engineering, Technical University of Denmark, rsteds Plads, Building 343, 2800 Lyngby, Denmark.
  • Lu Y; Department of Electrical and Photonics Engineering, Technical University of Denmark, rsteds Plads, Building 343, 2800 Lyngby, Denmark.
  • Chaussende D; Université Grenoble Alpes, CNRS, Grenoble INP, SIMaP, 38000 Grenoble, France.
  • Rottwitt K; Department of Electrical and Photonics Engineering, Technical University of Denmark, rsteds Plads, Building 343, 2800 Lyngby, Denmark.
  • Ou H; Department of Electrical and Photonics Engineering, Technical University of Denmark, rsteds Plads, Building 343, 2800 Lyngby, Denmark.
Materials (Basel) ; 16(6)2023 Mar 14.
Article in En | MEDLINE | ID: mdl-36984202
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Materials (Basel) Year: 2023 Document type: Article Affiliation country: Denmark Country of publication: Switzerland
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Full text: 1 Collection: 01-internacional Database: MEDLINE Language: En Journal: Materials (Basel) Year: 2023 Document type: Article Affiliation country: Denmark Country of publication: Switzerland