Thickness measurement of nm HfO2 films.
Metrologia
; 58(1A)2021.
Article
in En
| MEDLINE
| ID: mdl-38883307
Full text:
1
Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
Metrologia
Year:
2021
Document type:
Article
Country of publication:
United kingdom