A high-resolution add-on in-lens attachment for scanning electron microscopes.
Scanning
; 23(3): 204-10, 2001.
Article
en En
| MEDLINE
| ID: mdl-11405306
ABSTRACT
A compact add-on objective lens for the scanning electron microscope (SEM) has been designed and tested. The lens is < 35 mm high and can be fitted on to the specimen stage as an easy-to-use attachment. Initial results show that it typically improves the spatial resolution of the SEM by a factor of three. The add-on unit is based upon a permanent magnet immersion lens design. Apart from the extra attachment to the specimen stage, the SEM with the add-on lens functions in the normal way. The in-lens unit can comfortably accommodate specimen heights up to 10 mm. The new add-on lens unit opens up the possibility of operating existing SEMs in the high-resolution in-lens mode. By using a deflector at the top of the add-on lens unit, it can also operate as a quantitative multichannel voltage contrast spectrometer, capable of recording the energy spectrum of the emitted secondary electrons. Initial experiments confirm that a significant amount of voltage contrast can be obtained.
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Colección:
01-internacional
Base de datos:
MEDLINE
Idioma:
En
Revista:
Scanning
Año:
2001
Tipo del documento:
Article
País de afiliación:
Singapur