Vibration maps of capacitive micromachined ultrasonic transducers by laser interferometry.
IEEE Trans Ultrason Ferroelectr Freq Control
; 49(3): 289-92, 2002 Mar.
Article
en En
| MEDLINE
| ID: mdl-12322876
ABSTRACT
In this letter, a 1.8-mm x 1.8-mm capacitive micromachined ultrasonic transducer (CMUT) element is experimentally characterized by means of optical measurements. Optical displacement measurements provide information on the resonant behavior of the single membranes and also allow us to investigate the dispersion in the frequency spectrum of adjacent membranes. In addition, higher order mode shapes are observed, showing that either symmetrical or asymmetrical modes are excited in CMUT membranes. Laser interferometry vibration maps, combined with quantitative displacement measurements, provide information about the quality and repeatability of the fabrication process, which is a basic requirement for 2-D array fabrication for ultrasound imaging.
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Colección:
01-internacional
Base de datos:
MEDLINE
Asunto principal:
Transductores
/
Ensayo de Materiales
/
Imagenología Tridimensional
/
Interferometría
/
Membranas Artificiales
Tipo de estudio:
Diagnostic_studies
Idioma:
En
Revista:
IEEE Trans Ultrason Ferroelectr Freq Control
Asunto de la revista:
MEDICINA NUCLEAR
Año:
2002
Tipo del documento:
Article