Saturated 13.2 nm high-repetition-rate laser in nickellike cadmium.

ABSTRACT

We report gain-saturated operation of a 13.2 nm table-top laser in Ni-like Cd at a 5 Hz repetition rate. A gain-length product G x L = 17.6 was obtained by heating a precreated plasma with 8 ps duration Tisapphire laser pulses with an energy of only 1 J impinging at a grazing angle of 23 degrees. With an average power of approximately 1 muW [corrected] this laser is an attractive coherent source for at-wavelength metrology of extreme UV lithography optics and other applications.