High-throughput rear-surface drilling of microchannels in glass based on electron dynamics control using femtosecond pulse trains.
Opt Lett
; 37(14): 2781-3, 2012 Jul 15.
Article
en En
| MEDLINE
| ID: mdl-22825132
ABSTRACT
This study proposes a rear-surface ablation enhancement approach to fabricate high-aspect-ratio microchannels by temporally shaping femtosecond laser pulse trains. In the case study of K9 glass, enhancements of up to a 56 times higher material removal rate and a three times greater maximum drilling depth are obtained by the proposed method, as compared with conventional femtosecond laser drilling at the same processing parameters. The improvements are due to the changes of photon-electron interactions by shaping femtosecond pulse train, which can effectively adjust the photon absorption and localized transient material properties by changing electron dynamics such as free electron densities.
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1
Colección:
01-internacional
Base de datos:
MEDLINE
Idioma:
En
Revista:
Opt Lett
Año:
2012
Tipo del documento:
Article
País de afiliación:
China