Lanthanide-Assisted Deposition of Strongly Electro-optic PZT Thin Films on Silicon: Toward Integrated Active Nanophotonic Devices.

George, J P; Smet, P F; Botterman, J; Bliznuk, V; Woestenborghs, W; Van Thourhout, D; Neyts, K; Beeckman, J

George, J P; Smet, P F; Botterman, J; Bliznuk, V; Woestenborghs, W; Van Thourhout, D; Neyts, K; Beeckman, J.

Afiliación

George JP; Department of Electronics and Information Systems, Ghent University, Sint-Pietersnieuwstraat 41, 9000 Gent, Belgium.
Smet PF; Department of Information Technology, Ghent University, Sint-Pietersnieuwstraat 41, 9000 Gent, Belgium.
Botterman J; â¥Center for Nano- and Biophotonics (NB-Photonics), Ghent University, 9000 Gent, Belgium.
Bliznuk V; §LumiLab, Department of Solid State Sciences, Ghent University, Krijgslaan 281-S1, 9000 Gent, Belgium.
Woestenborghs W; â¥Center for Nano- and Biophotonics (NB-Photonics), Ghent University, 9000 Gent, Belgium.
Van Thourhout D; §LumiLab, Department of Solid State Sciences, Ghent University, Krijgslaan 281-S1, 9000 Gent, Belgium.
Neyts K; â¥Center for Nano- and Biophotonics (NB-Photonics), Ghent University, 9000 Gent, Belgium.
Beeckman J; â¥Department of Materials Science and Engineering, Ghent University, Technologiepark 903, B-9052 Zwijnaarde, Belgium.

ACS Appl Mater Interfaces ; 7(24): 13350-9, 2015 Jun 24.

Article en En | MEDLINE | ID: mdl-26043103

Palabras clave

chemical solution deposition; dielectric; electro-optic effect; ellipsometry; lead zirconate titanate; modulator; pockels coefficient

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: ACS Appl Mater Interfaces Asunto de la revista: BIOTECNOLOGIA / ENGENHARIA BIOMEDICA Año: 2015 Tipo del documento: Article País de afiliación: Bélgica Pais de publicación: Estados Unidos

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