Measuring electro-mechanical properties of thin films on polymer substrates.

Cordill, Megan J; Glushko, O; Kreith, J; Marx, V M; Kirchlechner, C

Cordill, Megan J; Glushko, O; Kreith, J; Marx, V M; Kirchlechner, C.

Afiliación

Cordill MJ; Erich Schmid Institute of Materials Science, Austrian Academy of Sciences, Jahnstrasse 12, 8700 Leoben, Austria.
Glushko O; Erich Schmid Institute of Materials Science, Austrian Academy of Sciences, Jahnstrasse 12, 8700 Leoben, Austria.
Kreith J; Department of Material Physics, Montanuniversität Leoben, Jahnstrasse 12, 8700 Leoben, Austria.
Marx VM; Max-Planck-Institut für Eisenforschung GmbH, Max-Planck-Str. 1, 40237 Düsseldorf, Germany.
Kirchlechner C; Max-Planck-Institut für Eisenforschung GmbH, Max-Planck-Str. 1, 40237 Düsseldorf, Germany.

Microelectron Eng ; 137: 96-100, 2015 Apr 02.

Article en En | MEDLINE | ID: mdl-26082564

Palabras clave

AFM; Flexible substrates; Fragmentation; In-situ; Resistance; Thin films

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Microelectron Eng Año: 2015 Tipo del documento: Article País de afiliación: Austria

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