Note: Thermally stable thin-film filters for high-power extreme-ultraviolet applications.
Rev Sci Instrum
; 86(11): 116103, 2015 Nov.
Article
en En
| MEDLINE
| ID: mdl-26628184
We investigated several types of thin-film filters for high intensity work in the extreme-ultraviolet (EUV) spectral range. In our application, with a peak EUV intensity of 2.7 W cm(-2), Ni-mesh-backed Zr filters have a typical lifetime of 20 h, at which point they suffer from pinholes and a 50% loss of transmission. Initial trials with Si filters on Ni meshes resulted in rupture of the filters in less than an hour. A simple thermal calculation showed that the temperature rise in those filters to be about 634 K. A similar calculation indicated that using a finer mesh with thicker wires and made of Cu reduces the temperature increase to about 60 K. We have exposed a Si filter backed by such a mesh for more than 60 h with little loss of transmission and no leaks.
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Colección:
01-internacional
Base de datos:
MEDLINE
Idioma:
En
Revista:
Rev Sci Instrum
Año:
2015
Tipo del documento:
Article
País de afiliación:
Estados Unidos
Pais de publicación:
Estados Unidos