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Optimizing Hybrid Metrology: Rigorous Implementation of Bayesian and Combined Regression.
Henn, Mark-Alexander; Silver, Richard M; Villarrubia, John S; Zhang, Nien Fan; Zhou, Hui; Barnes, Bryan M; Ming, Bin; Vladár, András E.
Afiliación
  • Henn MA; Engineering Physics Division, National Institute of Standards and Technology, 100 Bureau Drive MS 8212, Gaithersburg, MD, USA 20899-8212.
  • Silver RM; Engineering Physics Division, National Institute of Standards and Technology, 100 Bureau Drive MS 8212, Gaithersburg, MD, USA 20899-8212.
  • Villarrubia JS; Engineering Physics Division, National Institute of Standards and Technology, 100 Bureau Drive MS 8212, Gaithersburg, MD, USA 20899-8212.
  • Zhang NF; Statistical Engineering Division, National Institute of Standards and Technology, 100 Bureau Drive MS 8212, Gaithersburg, MD, USA 20899-8212.
  • Zhou H; Engineering Physics Division, National Institute of Standards and Technology, 100 Bureau Drive MS 8212, Gaithersburg, MD, USA 20899-8212.
  • Barnes BM; Engineering Physics Division, National Institute of Standards and Technology, 100 Bureau Drive MS 8212, Gaithersburg, MD, USA 20899-8212.
  • Ming B; Engineering Physics Division, National Institute of Standards and Technology, 100 Bureau Drive MS 8212, Gaithersburg, MD, USA 20899-8212.
  • Vladár AE; Engineering Physics Division, National Institute of Standards and Technology, 100 Bureau Drive MS 8212, Gaithersburg, MD, USA 20899-8212.
J Micro Nanolithogr MEMS MOEMS ; 14(4): 0440011-440018, 2015.
Article en En | MEDLINE | ID: mdl-26681991
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: J Micro Nanolithogr MEMS MOEMS Año: 2015 Tipo del documento: Article Pais de publicación: Estados Unidos
Texto completo
Añadir a Mi BVS
Imprimir
XML
PubMed Links
Buscar en Google

Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: J Micro Nanolithogr MEMS MOEMS Año: 2015 Tipo del documento: Article Pais de publicación: Estados Unidos