Capacitive micromachined ultrasonic transducers based on annular cell geometry for air-coupled applications.

Na, Shuai; Chen, Albert I H; Wong, Lawrence L P; Li, Zhenhao; Macecek, Mirek; Yeow, John T W

Na, Shuai; Chen, Albert I H; Wong, Lawrence L P; Li, Zhenhao; Macecek, Mirek; Yeow, John T W.

Afiliación

Na S; Advanced Micro-/Nano-Devices Lab, Department of Systems Design Engineering, Waterloo Institute for Nanotechnology, University of Waterloo, 200 University Avenue West, Waterloo, ON N2L 3G1, Canada.
Chen AIH; Advanced Micro-/Nano-Devices Lab, Department of Systems Design Engineering, Waterloo Institute for Nanotechnology, University of Waterloo, 200 University Avenue West, Waterloo, ON N2L 3G1, Canada.
Wong LLP; Advanced Micro-/Nano-Devices Lab, Department of Systems Design Engineering, Waterloo Institute for Nanotechnology, University of Waterloo, 200 University Avenue West, Waterloo, ON N2L 3G1, Canada.
Li Z; Advanced Micro-/Nano-Devices Lab, Department of Systems Design Engineering, Waterloo Institute for Nanotechnology, University of Waterloo, 200 University Avenue West, Waterloo, ON N2L 3G1, Canada.
Macecek M; Techno Scientific Inc, 259 Edgeley Blvd, Concord, ON L4K 3Y5, Canada.
Yeow JTW; Advanced Micro-/Nano-Devices Lab, Department of Systems Design Engineering, Waterloo Institute for Nanotechnology, University of Waterloo, 200 University Avenue West, Waterloo, ON N2L 3G1, Canada. Electronic address: jyeow@uwaterloo.ca.

Ultrasonics ; 71: 152-160, 2016 09.

Article en En | MEDLINE | ID: mdl-27352025

Palabras clave

Air-coupled ultrasound; Annular cells; Capacitive micromachined ultrasonic transducers (CMUTs)

Texto completo

Añadir a Mi BVS

Imprimir

XML

PubMed Links

Buscar en Google

Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Ultrasonics Año: 2016 Tipo del documento: Article País de afiliación: Canadá Pais de publicación: Países Bajos

Texto completo

Añadir a Mi BVS

Imprimir

XML

PubMed Links

Buscar en Google