A novel AFM-based 5-axis nanoscale machine tool for fabrication of nanostructures on a micro ball.

Geng, Yanquan; Wang, Yuzhang; Yan, Yongda; Zhao, Xuesen

Geng, Yanquan; Wang, Yuzhang; Yan, Yongda; Zhao, Xuesen.

Afiliación

Geng Y; Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin, Heilongjiang 150001, People's Republic of China.
Wang Y; Center for Precision Engineering, Harbin Institute of Technology, Harbin, Heilongjiang 150001, People's Republic of China.
Yan Y; Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin, Heilongjiang 150001, People's Republic of China.
Zhao X; Center for Precision Engineering, Harbin Institute of Technology, Harbin, Heilongjiang 150001, People's Republic of China.

Rev Sci Instrum ; 88(11): 115109, 2017 Nov.

Article en En | MEDLINE | ID: mdl-29195400

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Rev Sci Instrum Año: 2017 Tipo del documento: Article Pais de publicación: Estados Unidos

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