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EUV polarimetry for thin film and surface characterization and EUV phase retarder reflector development.
Gaballah, A E H; Nicolosi, P; Ahmed, Nadeem; Jimenez, K; Pettinari, G; Gerardino, A; Zuppella, P.
Afiliación
  • Gaballah AEH; University of Padova, Department of Information Engineering, Via Gradenigo 6B, 35131 Padova, Italy.
  • Nicolosi P; University of Padova, Department of Information Engineering, Via Gradenigo 6B, 35131 Padova, Italy.
  • Ahmed N; University of Padova, Department of Information Engineering, Via Gradenigo 6B, 35131 Padova, Italy.
  • Jimenez K; University of Padova, Department of Information Engineering, Via Gradenigo 6B, 35131 Padova, Italy.
  • Pettinari G; Italian National Research Council-Institute for Photonics and Nanotechnologies (CNR-IFN), Via Cineto Romano 42, Rome 00156, Italy.
  • Gerardino A; Italian National Research Council-Institute for Photonics and Nanotechnologies (CNR-IFN), Via Cineto Romano 42, Rome 00156, Italy.
  • Zuppella P; CNR-IFN UOS Padova, Via Trasea 7, 35131 Padova, Italy.
Rev Sci Instrum ; 89(1): 015108, 2018 Jan.
Article en En | MEDLINE | ID: mdl-29390727
ABSTRACT
The knowledge and the manipulation of light polarization state in the vacuum ultraviolet and extreme ultraviolet (EUV) spectral regions play a crucial role from materials science analysis to optical component improvements. In this paper, we present an EUV spectroscopic ellipsometer facility for polarimetry in the 90-160 nm spectral range. A single layer aluminum mirror to be used as a quarter wave retarder has been fully characterized by deriving the optical and structural properties from the amplitude component and phase difference δ measurements. The system can be suitable to investigate the properties of thin films and optical coatings and optics in the EUV region.
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Rev Sci Instrum Año: 2018 Tipo del documento: Article País de afiliación: Italia
Texto completo
Añadir a Mi BVS
Imprimir
XML
PubMed Links
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Rev Sci Instrum Año: 2018 Tipo del documento: Article País de afiliación: Italia