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Fabrication of Tapered Micropillars with High Aspect-Ratio Based on Deep X-ray Lithography.
Park, Jae Man; Kim, Jong Hyun; Han, Jun Sae; Shin, Da Seul; Park, Sung Cheol; Son, Seong Ho; Park, Seong Jin.
Afiliación
  • Park JM; Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), 77 Cheongam-Ro, Nam-Gu, Pohang, Gyeongbuk 37673, Korea.
  • Kim JH; Pohang Accelerator Laboratory (PAL), Pohang University of Science and Technology (POSTECH), 77 Cheongam-Ro, Nam-Gu, Pohang, Gyeongbuk 37673, Korea.
  • Han JS; Department of Nano Manufacturing Technology, Korea Institute of Machinery & Materials (KIMM), 156, Gajeongbuk-ro, Yuseong-gu, Daejeon 34103, Korea.
  • Shin DS; Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), 77 Cheongam-Ro, Nam-Gu, Pohang, Gyeongbuk 37673, Korea.
  • Park SC; Surface Treatment R&D Group, Korea Institute of Industrial Technology (KITECH), 156 Gaetbeol-ro, Yeonsu-gu, Incheon 21999, Korea,.
  • Son SH; Surface Treatment R&D Group, Korea Institute of Industrial Technology (KITECH), 156 Gaetbeol-ro, Yeonsu-gu, Incheon 21999, Korea,.
  • Park SJ; Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), 77 Cheongam-Ro, Nam-Gu, Pohang, Gyeongbuk 37673, Korea. sjpark87@postech.ac.kr.
Materials (Basel) ; 12(13)2019 Jun 26.
Article en En | MEDLINE | ID: mdl-31247998
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Tipo de estudio: Clinical_trials Idioma: En Revista: Materials (Basel) Año: 2019 Tipo del documento: Article Pais de publicación: Suiza
Texto completo
Añadir a Mi BVS
Imprimir
XML
PubMed Links
Buscar en Google

Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Tipo de estudio: Clinical_trials Idioma: En Revista: Materials (Basel) Año: 2019 Tipo del documento: Article Pais de publicación: Suiza