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Dependence of water adsorption on the surface structure of silicon wafers aged under different environmental conditions.
Chen, Lei; Ngo, Dien; Luo, Jiawei; Gong, Yunfei; Xiao, Chen; He, Xin; Yu, Bingjun; Qian, Linmao; Kim, Seong H.
Afiliación
  • Chen L; Tribology Research Institute, Key Laboratory of Advanced Technology of Materials, Ministry of Education, Southwest Jiaotong University, Chengdu 610031, China. linmao@swjtu.edu.cn.
  • Ngo D; Department of Chemical Engineering and Materials Research Institute, Pennsylvania State University, University Park, PA 16802, USA. shkim@engr.psu.edu.
  • Luo J; Department of Chemical Engineering and Materials Research Institute, Pennsylvania State University, University Park, PA 16802, USA. shkim@engr.psu.edu.
  • Gong Y; Tribology Research Institute, Key Laboratory of Advanced Technology of Materials, Ministry of Education, Southwest Jiaotong University, Chengdu 610031, China. linmao@swjtu.edu.cn.
  • Xiao C; Tribology Research Institute, Key Laboratory of Advanced Technology of Materials, Ministry of Education, Southwest Jiaotong University, Chengdu 610031, China. linmao@swjtu.edu.cn.
  • He X; Department of Chemical Engineering and Materials Research Institute, Pennsylvania State University, University Park, PA 16802, USA. shkim@engr.psu.edu.
  • Yu B; Tribology Research Institute, Key Laboratory of Advanced Technology of Materials, Ministry of Education, Southwest Jiaotong University, Chengdu 610031, China. linmao@swjtu.edu.cn.
  • Qian L; Tribology Research Institute, Key Laboratory of Advanced Technology of Materials, Ministry of Education, Southwest Jiaotong University, Chengdu 610031, China. linmao@swjtu.edu.cn.
  • Kim SH; Department of Chemical Engineering and Materials Research Institute, Pennsylvania State University, University Park, PA 16802, USA. shkim@engr.psu.edu.
Phys Chem Chem Phys ; 21(47): 26041-26048, 2019 Dec 21.
Article en En | MEDLINE | ID: mdl-31746864
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Tipo de estudio: Prognostic_studies Idioma: En Revista: Phys Chem Chem Phys Asunto de la revista: BIOFISICA / QUIMICA Año: 2019 Tipo del documento: Article País de afiliación: China
Texto completo
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Tipo de estudio: Prognostic_studies Idioma: En Revista: Phys Chem Chem Phys Asunto de la revista: BIOFISICA / QUIMICA Año: 2019 Tipo del documento: Article País de afiliación: China