Understanding Pore Formation in ALD Alumina Overcoats.

George, Cassandra; Littlewood, Patrick; Stair, Peter C

George, Cassandra; Littlewood, Patrick; Stair, Peter C.

Afiliación

George C; Department of Chemistry, Northwestern University, Evanston, Illinois 60208-3113, United States.
Littlewood P; Department of Chemistry, Northwestern University, Evanston, Illinois 60208-3113, United States.
Stair PC; Department of Chemistry, Northwestern University, Evanston, Illinois 60208-3113, United States.

ACS Appl Mater Interfaces ; 12(18): 20331-20343, 2020 May 06.

Article en En | MEDLINE | ID: mdl-32292027

Palabras clave

ALD; nanoparticles; porosity; selective catalysis; thin films

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: ACS Appl Mater Interfaces Asunto de la revista: BIOTECNOLOGIA / ENGENHARIA BIOMEDICA Año: 2020 Tipo del documento: Article País de afiliación: Estados Unidos Pais de publicación: Estados Unidos

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