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Direct Nanomachining on Semiconductor Wafer By Scanning Electrochemical Microscopy.
Han, Lianhuan; Hu, Zhenjiang; Sartin, Matthew M; Wang, Xiaole; Zhao, Xuesen; Cao, Yongzhi; Yan, Yongda; Zhan, Dongping; Tian, Zhong-Qun.
Afiliación
  • Han L; Department Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Centre for Precision Engineering, Harbin Institute of Technology, Harbin, 150001, China.
  • Hu Z; Department of Mechanical and Electrical Engineering, School of Aerospace Engineering, Xiamen University, Xiamen, 361005, China.
  • Sartin MM; State Key Laboratory of Physical Chemistry of Solid Surfaces (PCOSS), Collaborative Innovation Center of Chemistry for Energy Materials (iChEM), Engineering Research Center of Electrochemical Technologies of Ministry of Education, Department of Chemistry, College of Chemistry and Chemical Engineerin
  • Wang X; Department Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Centre for Precision Engineering, Harbin Institute of Technology, Harbin, 150001, China.
  • Zhao X; State Key Laboratory of Physical Chemistry of Solid Surfaces (PCOSS), Collaborative Innovation Center of Chemistry for Energy Materials (iChEM), Engineering Research Center of Electrochemical Technologies of Ministry of Education, Department of Chemistry, College of Chemistry and Chemical Engineerin
  • Cao Y; Department Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Centre for Precision Engineering, Harbin Institute of Technology, Harbin, 150001, China.
  • Yan Y; Department Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Centre for Precision Engineering, Harbin Institute of Technology, Harbin, 150001, China.
  • Zhan D; Department Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Centre for Precision Engineering, Harbin Institute of Technology, Harbin, 150001, China.
  • Tian ZQ; Department Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Centre for Precision Engineering, Harbin Institute of Technology, Harbin, 150001, China.
Angew Chem Int Ed Engl ; 59(47): 21129-21134, 2020 Nov 16.
Article en En | MEDLINE | ID: mdl-32737918
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Angew Chem Int Ed Engl Año: 2020 Tipo del documento: Article País de afiliación: China Pais de publicación: Alemania
Texto completo
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XML
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Angew Chem Int Ed Engl Año: 2020 Tipo del documento: Article País de afiliación: China Pais de publicación: Alemania