The impact of focused ion beam induced damage on scanning spreading resistance microscopy measurements.

Pandey, Komal; Paredis, Kristof; Hantschel, Thomas; Drijbooms, Chris; Vandervorst, Wilfried

The impact of focused ion beam induced damage on scanning spreading resistance microscopy measurements.

Pandey, Komal; Paredis, Kristof; Hantschel, Thomas; Drijbooms, Chris; Vandervorst, Wilfried.

Afiliación

Pandey K; Imec, Kapeldreef 75, 3001, Leuven, Belgium. komal.pandey@imec.be.
Paredis K; Quantum Solid State Physics, KU Leuven, Celestijnenlaan 200D, 3001, Leuven, Belgium. komal.pandey@imec.be.
Hantschel T; Imec, Kapeldreef 75, 3001, Leuven, Belgium.
Drijbooms C; Imec, Kapeldreef 75, 3001, Leuven, Belgium.
Vandervorst W; Imec, Kapeldreef 75, 3001, Leuven, Belgium.

Sci Rep ; 10(1): 14893, 2020 Sep 10.

Article en En | MEDLINE | ID: mdl-32913186

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Sci Rep Año: 2020 Tipo del documento: Article País de afiliación: Bélgica