An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization.

Andany, Santiago H; Hlawacek, Gregor; Hummel, Stefan; Brillard, Charlène; Kangül, Mustafa; Fantner, Georg E

Andany, Santiago H; Hlawacek, Gregor; Hummel, Stefan; Brillard, Charlène; Kangül, Mustafa; Fantner, Georg E.

Afiliación

Andany SH; Laboratory for Bio- and Nano-Instrumentation, Swiss Federal Institute of Technology Lausanne (EPFL), Lausanne CH-1015, Switzerland.
Hlawacek G; Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Dresden 01328, Germany.
Hummel S; GETec Microscopy GmbH, Vienna 1220, Austria.
Brillard C; Laboratory for Bio- and Nano-Instrumentation, Swiss Federal Institute of Technology Lausanne (EPFL), Lausanne CH-1015, Switzerland.
Kangül M; Laboratory for Bio- and Nano-Instrumentation, Swiss Federal Institute of Technology Lausanne (EPFL), Lausanne CH-1015, Switzerland.
Fantner GE; Laboratory for Bio- and Nano-Instrumentation, Swiss Federal Institute of Technology Lausanne (EPFL), Lausanne CH-1015, Switzerland.

Beilstein J Nanotechnol ; 11: 1272-1279, 2020.

Article en En | MEDLINE | ID: mdl-32953371

Palabras clave

atomic force microscopy (AFM); combined setup; correlative microscopy; helium ion microscopy (HIM); self-sensing cantilevers

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Beilstein J Nanotechnol Año: 2020 Tipo del documento: Article País de afiliación: Suiza Pais de publicación: Alemania

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