Charge measurement of SiO_{2} nanoparticles in an rf plasma by ir absorption.

ABSTRACT

We have performed measurements of the ir absorption of SiO_{2} nanoparticles confined in an argon radiofrequency plasma discharge using a Fourier transform infrared spectrometer. By varying the gas pressure of the discharge and duty cycle of the applied radiofrequency voltage, we observed a shift of the absorption peak of SiO_{2}. We attributed this shift to charge-dependent absorption features of SiO_{2}. The charge-dependent shift has been calculated for SiO_{2} particles, and from comparisons with the experiment the particle charge has been retrieved using our infrared phonon resonance shift method. With the two different approaches of changing the gas pressure and altering the duty cycle, we are able to deduce a relative change of the particle charge with pressure variations and an absolute estimate of the charge with the duty cycle.